Autoclave Semiconductor Supplier | Autoclave Machine Manufacturer

Model	PO-700
Heating Method	Convection
Dimension (mm)	Internal	W560 × D650 × H405
External	W1400 × D2060 × H1590
Process Chamber Material	SUS304 Polishing
Temperature Control Method	Programmable PID Control
Thermocouple Type	K-Type
Temp Uniformity	Set temp. ±3℃ at 60℃ (Design Temp : 230℃)
Chamber working pressure	16 kgf/㎠ (Max 22 kgf/㎠)
Pressurizing method	Provided by CDA & Booster
Pressure Control	Increase / Decrease: Valve (segments) control
Heater	Sheath Pin Heater
Air circulating method	Sirocco Fan + Motor
Motor Shaft Sealing	Magnetic Driver Seal

Model

PO-700

Heating Method

Convection

Dimension
(mm)

Internal

W560 × D650 × H405

External

W1400 × D2060 × H1590

Process Chamber Material

SUS304 Polishing

Temperature Control Method

Programmable PID Control

Thermocouple Type

K-Type

Temp Uniformity

Set temp. ±3℃ at 60℃ (Design Temp : 230℃)

Chamber working pressure

16 kgf/㎠ (Max 22 kgf/㎠)

Pressurizing method

Provided by CDA & Booster

Pressure Control

Increase / Decrease: Valve (segments) control

Heater

Sheath Pin Heater

Air circulating method

Sirocco Fan + Motor

Motor Shaft Sealing

Magnetic Driver Seal

Autoclave

최고관리자 작성일17-04-17 00:01

For semiconductor industry
IR-PC-700

Model		PO-700
Heating Method		Convection
Dimension (mm)	Internal	W560 × D650 × H405
Dimension (mm)	External	W1400 × D2060 × H1590
Process Chamber Material		SUS304 Polishing
Temperature Control Method		Programmable PID Control
Thermocouple Type		K-Type
Temp Uniformity		Set temp. ±3℃ at 60℃ (Design Temp : 230℃)
Chamber working pressure		16 kgf/㎠ (Max 22 kgf/㎠)
Pressurizing method		Provided by CDA & Booster
Pressure Control		Increase / Decrease: Valve (segments) control
Heater		Sheath Pin Heater
Air circulating method		Sirocco Fan + Motor
Motor Shaft Sealing		Magnetic Driver Seal

※ Size and other specifications are always negotiable with clients' demand.