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중형 Autoclave
반도체 공정용

모델명   :   IR-PC-700
제품특징   :   반도체 공정용

 

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제품사양 (Specification)

Model PO-700
Heating Method Convection
Dimension
(mm)
Internal W560 × D650 × H405
External W1400 × D2060 × H1590
Process Chamber Material SUS304 Polishing
Temperature Control Method Programmable PID Control
Thermocouple Type K-Type
Temp Uniformity Set temp. ±3℃ at 60℃ (Design Temp : 230℃)
Chamber working pressure 16 kgf/㎠ (Max 22 kgf/㎠)
Pressurizing method Provided by CDA & Booster
Pressure Control Increase / Decrease: Valve (segments) control
Heater Sheath Pin Heater
Air circulating method Sirocco Fan + Motor
Motor Shaft Sealing Magnetic Driver Seal