Autoclave for Semiconductors

 

Autoclave for Semiconductors

IR-SEMI-600F 


용도

well-used for semiconductor industry




제품사양

ModelSEMI-550-800F
IR-SEMI-600F
Chamber Volume 180L
325L
TemperatureRange50°C~100°C/Cooling (Option)
Accuracy±5°C at 100°C / Cooling (Option)
Controller
Digital PID control system ±1.0°C
Stability
±1.0°C
Heat up time
100°C within 20-60 min
PressureRange1-9 bar or more
Interior
Stainless steel
ExteriorStainless steel, 1.2t, double painted & baked
Heater
Sheath heater
Insulation
Cerak wool
Door packing
Heat resistance silicone rubber
Dimension
(W x D x H, mm)
Internal
Ø550 x 600L
Ø600 x 1100L
Working size
350W x 350D x 200H
380W x 500D x 320H
External
1450W x 1900D x 1700H
1480W x 2400D x 2500H
Power
220/380V 3P, 50/60Hz(can be re-negotiated)


* Electric & Pressure requirements can be fairly decided and fixed with your demands.
* Dual-Chamber Type is also widely manufactured for an operation in different conditions.
* Safety devices are installed for users' protection and convenient to operate.
* All devices are easily-controllable and sectional controls can also be done.
* Rapid heating/cooling function (Cooling Radiator, Heater; high-capacity & temperature)
* Other specifications are always negotiable as we manufacture based on your demands.


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