중형 Autoclave : 이레테크-제품소개-반도체용 장비

알림

반도체용 장비

중형 Autoclave

Autoclave For semiconductor industry

IR-PC-700

용도

반도체 공정용

제품사양

Model		IR-DPC-700 (Dual Chamber)
Heating Method		Convection
Dimension (mm)	Internal	W560 × D650 × H405
	External	W1400 × D2060 × H1590
Process Chamber Material		SUS304 Polishing
Temperature Control Method		Programmable PID Control
Thermocouple Type		K-Type
Temp Uniformity		Set temp. ±3℃ at 60℃ (Design Temp : 230℃)
Chamber working pressure		16 kgf/㎠ (Max 22 kgf/㎠)
Pressurizing method		Provided by CDA & Booster
Pressure Control		Increase / Decrease: Valve (segments) control
Heater		Sheath Pin Heater
Air circulating method		Sirocco Fan + Motor
Motor Shaft Sealing		Magnetic Driver Seal

투챔버 Autoclave